ULVAC 愛發(fā)科膜片式真空泵維修包/膜片/密封墊/墊片：DA-15 DA-30S DA-30D DA-60S DAT-100S DAT-50D DAP-6D DAP-12S DA-20D DA-40S DA-60D DA-120S DAU-100 DA-121D DA-241S DAL-181D DAL-361S DTC-22 DTC-41 DTC-60 DAP-15 DAP-30